Topic outline

• Welcome to the Course!
  

  Welcome to the Course!

  • Announcements Forum
  • EFEMs and Wafer Handling

  • Resources

  • Course Outline URL
  • Materials List URL
• Course Content
  

  Course Content

  • Activity 1: Introduction to EFEMs URL
  • Activity 2: EFEM Safety URL
  • Activity 3: Load Ports and FOUPs URL
  • Activity 4: EFEM Transfer Robots URL
  • Activity 5: Programming the Transfer Robot URL
  • Activity 6: The Pre-aligner URL
  • Activity 7: Robot & Pre-aligner Coordination URL
  • Activity 8: Transfer Robot Maintenance URL
  • Activity 9: Pre-aligner Maintenance URL
  • Activity 10: Load Lock Integration URL