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EFEMs and Wafer Handling
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Course Outline
Course Outline
Course Outline
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Materials List
Activity 1: Introduction to EFEMs
Activity 2: EFEM Safety
Activity 3: Load Ports and FOUPs
Activity 4: EFEM Transfer Robots
Activity 5: Programming the Transfer Robot
Activity 6: The Pre-aligner
Activity 7: Robot & Pre-aligner Coordination
Activity 8: Transfer Robot Maintenance
Activity 9: Pre-aligner Maintenance
Activity 10: Load Lock Integration
Materials List ►
