主题目录

• Welcome to the Course!
  

  Welcome to the Course!

  • Announcements 讨论区
  • EFEMs and Wafer Handling

  • Resources

  • Course Outline 网页地址
  • Materials List 网页地址
• Course Content
  

  Course Content

  • Activity 1: Introduction to EFEMs 网页地址
  • Activity 2: EFEM Safety 网页地址
  • Activity 3: Load Ports and FOUPs 网页地址
  • Activity 4: EFEM Transfer Robots 网页地址
  • Activity 5: Programming the Transfer Robot 网页地址
  • Activity 6: The Pre-aligner 网页地址
  • Activity 7: Robot & Pre-aligner Coordination 网页地址
  • Activity 8: Transfer Robot Maintenance 网页地址
  • Activity 9: Pre-aligner Maintenance 网页地址
  • Activity 10: Load Lock Integration 网页地址