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EFEMs and Wafer Handling

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Topic outline

  • Welcome to the Course!

    Welcome to the Course!

    • Announcements Forum

    • EFEMs and Wafer Handling

    • Resources

    • Course Outline URL
    • Materials List URL
  • Course Content

    Course Content

    • Activity 1: Introduction to EFEMs URL
    • Activity 2: EFEM Safety URL
    • Activity 3: Load Ports and FOUPs URL
    • Activity 4: EFEM Transfer Robots URL
    • Activity 5: Programming the Transfer Robot URL
    • Activity 6: The Pre-aligner URL
    • Activity 7: Robot & Pre-aligner Coordination URL
    • Activity 8: Transfer Robot Maintenance URL
    • Activity 9: Pre-aligner Maintenance URL
    • Activity 10: Load Lock Integration URL
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EFEMs and Wafer Handling
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    • English (United States) ‎(en_us)‎
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